KOBELCO PVD TECHNOLOGY
Coating Equipments

UBMS® Series for DLC

UnBalanced Magnetron Sputtering

UBMS® series is batch system using Unbalanced Magnetron Sputtering method. Since this system can provide fine and high density films, it is suitable for lubrication film coating such as DLC and Molybdenum disulfide.

Features of UBMS®

  1. 1. Plasma density is increased near substrate by imbalanced magnetic field.
  2. 2. Maximization of ion-assist effect.
  3. 3. Control of Film Properties: Composition, Adhesion, Crystallization, Surface condition
  • Argon ion is activated in plasma and hits target.

  • Activated argon ion sputters out metal atom from target.

  • Film deposition is made with sputtered metal ion.

Balanced Magnetron
UnBalanced Magnetron
Typical DLC
Nano-Multilayered DLC

KOBELCO DLC Coating is excellent in wear resistance, low friction and toughness with Nano-multilayered structure.

Typical DLC
Well Balanced DLC Film

Machine Lineup

AIP AIP-S20 AIP-S40 AIP-S70
Production scale R&D medium scale production large scale production
Recommended
Loading Space
φ 200mm
x H 120mm
φ 450mm
x H 400mm
or
φ 130mm
x H 400mm
x 6 spindles
φ 700mm
x H 800mm
or
φ 130mm
x H 800mm
x 12 spindles
Sputtering Source 1 to 3 4 7
Substrate Table Multi spindles planetary 6 spindles planetary rotary table 12 spindles planetary rotary table

Features of DLC by UBMS®

DLC (Diamond-like carbon) has widespread applications such as car parts, mechanical components, dies, molds etc. Because of its high mechanical hardness, chemical inertness, and low friction behavior.
KOBELCO can offer optimized DLC for each customer’s target by tuning coating parameters.

Applications of DLC and more

  1. Automobile parts (engine parts/ fuel pump parts )
  2. Mechanical parts (Ball bearing, ball screw, hydraulic pump parts )
  3. Cutting tools for aluminum
  4. Spinning tools for aluminum can
  5. Trimming dies for SUS/Copper tube
  6. Punches for SUS/aluminum sheet

and more

Advanced DLC by UBMS®

  • High Adhesion DLC
    1. Ion assist effect by UBM
    2. Optimized Interlayer
  • Hardness control and Multi-layer DLC
    1. Ion assist effect by UBM
  • Metal-doped DLC
    1. Co-sputter with metal target and carbon
  • Hydrogen content controlled DLC
    1. Solid carbon source
  • Hybrid coating with AIP

and more

Effect of KOBELCO DLC

Punching of SUS Sheets
Drilling of Al Alloy

BELCOAT™ by UBMS®

Name Type Hardness
(Hv)
Thickness
(μm)
Feature & Typical Applications
BELCOAT
B
Standard 1,500
to
2,500
0.5
to
5
Balance of Wear Resistance, Lubricity and Adhesion.Common Mechanical Component.
BELCOAT
HB
High Hardness 2,500
to
3,500
0.1
to
0.2
Focused on Wear Resistance Automotive Component Stamping Mold (For Non-Iron, Stainless Steel)
BELCOAT
UB
Ultra High Hardness 3,500
to
4,000
0.1
to
0.2
Focused on Wear Resistance Under High Pressure Automotive Component For Racing Use Cutting Tool(Non-Iron)
BELCOAT
NB
Nano-Multi Layer 1,500
to
2,500
0.1
to
0.15
Balance of Wear Resistance and Lubricity Toughness with Shock Resistant, Bearing, Punching Die
BELCOAT
MB
Metal Doped 1,000
to
2,000
0.15
to
0.25
Property Change by Metal Doping Relief of Film Stress Automotive Component, Plastic Injection Mold

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